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Frontiers of Mechanical Engineering >> 2014, Volume 9, Issue 1 doi: 10.1007/s11465-014-0286-x

Shape and topology optimization for tailoring the ratio between two flexural eigenfrequencies of atomic force microscopy cantilever probe

1. The State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China.

2. Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, NT, Hong Kong, China

Available online: 2014-05-16

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In an operation mode of atomic force microscopy that uses a higher eigenmode to determine the physical properties of material surface, the ratio between the eigenfrequency of a higher flexural eigenmode and that of the first flexural eigenmode was identified as an important parameter that affects the sensitivity and accessibility. Structure features such as cut-out are often used to tune the ratio of eigenfrequencies and to enhance the performance. However, there lacks a systematic and automatic method for tailoring the ratio. In order to deal with this issue, a shape and topology optimization problem is formulated, where the ratio between two eigenfrequencies is defined as a constraint and the area of the cantilever is maximized. The optimization problem is solved via the level set based method.

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