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Multi-throttle aerostatic guideway 1

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Design of Microstructure Parameters on a Small Multi-Throttle Aerostatic Guideway in Photolithography Article

Zhongpu Wen,  Jianwei Wu,  Kunpeng Xing, Yin Zhang,  Jiean Li,  Jiubin Tan

Engineering 2021, Volume 7, Issue 2,   Pages 226-237 doi: 10.1016/j.eng.2019.09.012

Abstract: preferred structure for high precision and acceleration motion in the variable-slit system (VS) of photolithographyIn a scanning test of the applied VS on argon fluoride laser (ArF) photolithography, the average scanning

Keywords： Photolithography     Multi-throttle aerostatic guideway     Microstructure     Working point     Rotational stiffness    

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Design of Microstructure Parameters on a Small Multi-Throttle Aerostatic Guideway in Photolithography

Zhongpu Wen,  Jianwei Wu,  Kunpeng Xing, Yin Zhang,  Jiean Li,  Jiubin Tan

Journal Article