How to Transfer MBE GaAs-based Microstructural Materials from Research to Mass Production

Kong Meiying、 Zeng Yiping

Strategic Study of CAE ›› 2000, Vol. 2 ›› Issue (5) : 28-30.

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PDF(1749 KB)
Strategic Study of CAE ›› 2000, Vol. 2 ›› Issue (5) : 28-30.
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How to Transfer MBE GaAs-based Microstructural Materials from Research to Mass Production

  • Kong Meiying、 Zeng Yiping

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Abstract

Novel microelectronic devices, such as HEMT and PHEMT, etc. , which are based on molecular beam epitaxial (MBE) GaAs-based microstructures, have found widespread applications in modern day information technology. These devices have already been commercialized in some foreign countries. In China, continuous endeavor since mid-80, s in making GaAs-based microstructural materials by MBE has led to successful realizations of many such novel devices. Notably, the HEMT and PHEMT devices made from microstructural materials grown by MBE in Institute of Semiconductors, Chinese Academy of Sciences have demonstrated very good performances approaching the world-best. This paper aims at exploring the ways by which such research results can be transferred from laboratory to market.

Keywords

MBE / GaAs-based microstructure materials / PHEMT / high technology industry

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Kong Meiying,Zeng Yiping. How to Transfer MBE GaAs-based Microstructural Materials from Research to Mass Production. Strategic Study of CAE, 2000, 2(5): 28‒30
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