
Si Micromachined Gyroscope Driven by the Rotating Carrier
Zhang Fuxue、 Mao Xu、 Zhang Wei
Strategic Study of CAE ›› 2006, Vol. 8 ›› Issue (8) : 23-27.
Si Micromachined Gyroscope Driven by the Rotating Carrier
Zhang Fuxue、 Mao Xu、 Zhang Wei
This paper reported a silicon micromachined gyroscope that is driven by the rotating carrier's angular velocity.The silicon chip was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced. The angular velocity of the rotating carrier was measured by emulator. The simulation experiment and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.
Si / anisotropy etching / angular velocity / emulator
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