The Negative Electrostatic Spring Effect Analysis and Experimental Validation of Silicon Micromechanical Vibrating zaxis Gyroscope

Xia Dunzhu、Zhou Bailing、Wang Shourong

Strategic Study of CAE ›› 2007, Vol. 9 ›› Issue (8) : 66-68.

PDF(387 KB)
PDF(387 KB)
Strategic Study of CAE ›› 2007, Vol. 9 ›› Issue (8) : 66-68.

The Negative Electrostatic Spring Effect Analysis and Experimental Validation of Silicon Micromechanical Vibrating zaxis Gyroscope

  • Xia Dunzhu、Zhou Bailing、Wang Shourong

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Abstract

The error principle caused by structural process imperfection of silicon micromechanical z-axis gyroscope in open mode is introduced firstly.  A new closed-loop control detection strategy is presented,  which would has advantage of minimizing the initial capacitance difference and restraining the cross-talk coupling errors.  The negative electrostatic spring effect of feedback force generator is analyzed in focus,  and its linear mathematics module is calculated out.  By computing the relation between the resonant frequency and feedback force added on the sense mode of MEMS z-axis gyroscope,  the inner relation between the ne gative electrostatic spring coefficient in sense axis and the voltage on the feedback force generator is deduced indirectly.  The theory has been testified by experiment,  which will lay foundation for the next design of closed-loop scheme.

Keywords

silicon micromechanical z-axis gyroscope / negative electrostatic spring constant / feedback force generator / MEMS(microelectronic mechanical system)

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Xia Dunzhu,Zhou Bailing,Wang Shourong. The Negative Electrostatic Spring Effect Analysis and Experimental Validation of Silicon Micromechanical Vibrating zaxis Gyroscope. Strategic Study of CAE, 2007, 9(8): 66‒68
PDF(387 KB)

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