2006, Volume 8, Issue 10
Strategic Study of CAE >> 2006, Volume 8, Issue 10
An Effective Method for Improving Silicon Micro-resonator System Performance
Department of Instrument Science and Engineering , Southeast University , Nanjing 210096, China
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Abstract
The working principle of silicon micro-resonator system was firstly introduced. An intelligence silicon micro-resonator system design and realization was presented in focus. Its two step working flows for roughness and fineness searching and digital interface technology were analyzed in detail. Combined with experimental data and sweeping curve, two different searching results came out under different vacuum circumstance and its working performance was well evaluated.
Keywords
direct digital synthesis (DDS) ; silicon micro-resonator ; AD9954 ; digital signal processing
Figures
图1 硅微谐振闭环系统驱动框图
图2 DDS扫描工作流程
图3 DDS串口连接图及操作时序
图4 谐振器在不同真空度环境下的扫频曲线
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