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correlation coefficient 1

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lateral shearing interferometry 1

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self-referenced measurement 1

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Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe

Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 143-157 doi: 10.1007/s11465-017-0432-3

Abstract: Self-referenced measurement techniques provide an effective means when the direct reference-based methodThis paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral

Keywords： self-referenced measurement     lateral shearing interferometry     multi-probe error separation     surface metrology    

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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 1,   Pages 37-43 doi: 10.1007/s11465-008-0001-x

Abstract: When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference

Keywords： mini-spectrophotometer     referenced     micro-silicon-fixer     electro-mechanical     correlation coefficient    

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Title Author Date Type Operation

Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe

Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI

Journal Article

Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Journal Article