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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 1,   Pages 37-43 doi: 10.1007/s11465-008-0001-x

Abstract: A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, whichare based on micro electro-mechanical systems (MEMS) technology.Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volumeThe final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer

Keywords： mini-spectrophotometer     referenced     micro-silicon-fixer     electro-mechanical     correlation coefficient    

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An Effective Method for Improving Silicon Micro-resonator System Performance

Xia Dunzhu,Wang Shourong,Zhou Bailing

Strategic Study of CAE 2006, Volume 8, Issue 10,   Pages 71-74

Abstract:

The working principle of silicon micro-resonator system was firstly introduced.An intelligence silicon micro-resonator system design and realization was presented in focus.

Keywords： direct digital synthesis (DDS)     silicon micro-resonator     AD9954     digital signal processing    

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Porous silica synthesis out of coal fly ash with no residue generation and complete silicon separation

Frontiers of Environmental Science & Engineering 2023, Volume 17, Issue 9, doi: 10.1007/s11783-023-1712-2

Abstract:

● Both amorphous and crystalline silicon are completely separated

Keywords： Coal fly ash     Alkali fusion     Micro-/meso-porous Si     Zeolite MCM-48     Crystalline transformation    

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A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method

Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 4,   Pages 333-339 doi: 10.1007/s11465-013-0276-4

Abstract:

A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabricationThrough locating steel micro balls into indents array, the preparation of multi-probe array can be realizedCombining the friction-induced scanning with selective etching in KOH solution, various micro-patternsAs a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may

Keywords： friction-induced fabrication     silicon     surface texture     friction     multi-probe    

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Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Strategic Study of CAE 2002, Volume 4, Issue 6,   Pages 56-62

Abstract:

The packaging of micro electro mechanical systems (MEMS) is referred to first-level packaging andIt is based on bulk silicon bonding technology and film sealed technology.The bulk silicon bonding technology includes electrostatic bonding, silicon direct bonding and interfacialIt is used to seal micro channel or micro hole to form a vacuum or low-pressure cavity or protect fromThe commercialized pressure sensors, accelerometers, digital micro mirror devices, etc., collected from

Keywords： packaging of MEMS     bulk silicon bonding technology     film-sealed technology    

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Effects of nano-silicon and common silicon on lead uptake and translocation in two rice cultivars

Jianguo LIU,Hui CAI,Congcong MEI,Mingxin WANG

Frontiers of Environmental Science & Engineering 2015, Volume 9, Issue 5,   Pages 905-911 doi: 10.1007/s11783-015-0786-x

Abstract: The current study investigated the effects of nano-silicon (Si) and common Si on lead (Pb) toxicity,

Keywords： silicon (Si)     lead (Pb)     rice (Oryza sativa L.)     toxicity     accumulation    

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Computer modeling of crystal growth of silicon for solar cells

Lijun LIU, Xin LIU, Zaoyang LI, Koichi KAKIMOTO

Frontiers in Energy 2011, Volume 5, Issue 3,   Pages 305-312 doi: 10.1007/s11708-011-0155-9

Abstract: A computer simulator with a global model of heat transfer during crystal growth of Si for solar cells is developed. The convective, conductive, and radiative heat transfers in the furnace are solved together in a coupled manner using the finite volume method. A three-dimensional (3D) global heat transfer model with 3D features is especially made suitable for any crystal growth, while the requirement for computer resources is kept permissible for engineering applications. A structured/unstructured combined mesh scheme is proposed to improve the efficiency and accuracy of the simulation. A dynamic model for the melt-crystal (mc) interface is developed to predict the phase interface behavior in a crystal growth process. Dynamic models for impurities and precipitates are also incorporated into the simulator. Applications of the computer simulator to Czochralski (CZ) growth processes and directional solidification processes of Si crystals for solar cells are introduced. Some typical results, including the turbulent melt flow in a large-scale crucible of a CZ-Si process, the dynamic behaviors of the mc interface, and the transport and distributions of impurities and precipitates, such as oxygen, carbon, and SiC particles, are presented and discussed. The findings show the importance of computer modeling as an effective tool in the analysis and improvement of crystal growth processes and furnace designs for solar Si material.

Keywords： computer modeling     silicon     crystal growth     solar cells    

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Atomistic understanding of interfacial processing mechanism of silicon in water environment: A ReaxFF

Frontiers of Mechanical Engineering 2021, Volume 16, Issue 3,   Pages 570-579 doi: 10.1007/s11465-021-0642-6

Abstract: The interfacial wear between silicon and amorphous silica in water environment is critical in numerousHowever, the understanding regarding the micro dynamic process is still unclear due to the limitationsHerein, reactive force field simulations are utilized to study the interfacial process between silicon

Keywords： silicon     ReaxFF     molecular dynamics     friction     damage    

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Effect of extrusion temperature on the physical properties of high-silicon aluminum alloy

YANG Fuliang, GAN Weiping, CHEN Zhaoke

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 1,   Pages 120-124 doi: 10.1007/s11465-007-0021-y

Abstract: Light-weight high-silicon aluminum alloys are used for electronic packaging in the aviation and space-flightExperimental results show that the density of high-silicon aluminum alloys prepared with this method

Keywords： coefficient     hermeticity     temperature     relationship     air-atomization    

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Behavior of Impurities, Defects and Surface Morphology for Silicon and Silicon Based Semiconducting Materials

Tu Hailing

Strategic Study of CAE 2000, Volume 2, Issue 1,   Pages 7-17

Abstract: Since silicon based materials as the alternative material systems have received strong growing interest, the manufacturing technologies and applications of SiGe, silicon-on-insulator (SOI) have been introducedFinally, the author outlooks the future scientific and engineering challenges and opportunities for siliconand silicon based materials envisioned for the sub quarter-micro and nanometer integrated circuits as

Keywords： silicon wafers     epitaxial silicon wafers     SiGe     silicon-on-insulator (SOI)     impurities behavior     defects control    

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Laser enhanced gettering of silicon substrates

Daniel CHEN,Matthew EDWARDS,Stuart WENHAM,Malcolm ABBOTT,Brett HALLAM

Frontiers in Energy 2017, Volume 11, Issue 1,   Pages 23-31 doi: 10.1007/s11708-016-0441-7

Abstract: One challenge to the use of lightly-doped, high efficiency emitters on multicrystalline silicon wafers, a novel laser based method for gettering is investigated for its impact on commercially available silicon

Keywords： gettering     multicystaline     silicon     impurities     laser doping    

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Special issue: Technologies for future high-efficiency industrial silicon wafer solar cells

Frontiers in Energy 2017, Volume 11, Issue 1,   Pages 1-3 doi: 10.1007/s11708-016-0436-4

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Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 539-545 doi: 10.1007/s11465-017-0427-0

Abstract:

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuitThe micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuitsIn our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect

Keywords： micro flow sensor     flexible sensor     surface flow sensing     aerodynamic parameter     micro aerial vehicle (MAV    

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Erratum to: Enhancing the photoelectrochemical performance of p-silicon through TiO coating decorated

Frontiers in Energy 2022, Volume 16, Issue 5,   Pages 876-877 doi: 10.1007/s11708-022-0832-x

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Effects of taping on grinding quality of silicon wafers in backgrinding

Zhigang DONG, Qian ZHANG, Haijun LIU, Renke KANG, Shang GAO

Frontiers of Mechanical Engineering 2021, Volume 16, Issue 3,   Pages 559-569 doi: 10.1007/s11465-020-0624-0

Abstract: Taping is often used to protect patterned wafers and reduce fragmentation during backgrinding of siliconGrinding experiments using coarse and fine resin-bond diamond grinding wheels were performed on siliconHowever, the PV value, surface roughness, and subsurface damage of silicon wafers with taping deterioratedThe PV value of silicon wafers with taping decreased with increasing mesh size of the grinding wheelThe surface roughness and subsurface damage of silicon wafers with taping decreased with increasing mesh

Keywords： taping     silicon wafer     backgrinding     subsurface damage     surface roughness    

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Title Author Date Type Operation

Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Journal Article

An Effective Method for Improving Silicon Micro-resonator System Performance

Xia Dunzhu,Wang Shourong,Zhou Bailing

Journal Article

Porous silica synthesis out of coal fly ash with no residue generation and complete silicon separation

Journal Article

A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method

Zhijiang WU, Chenfei SONG, Jian GUO, Bingjun YU, Linmao QIAN

Journal Article

Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Journal Article

Effects of nano-silicon and common silicon on lead uptake and translocation in two rice cultivars

Jianguo LIU,Hui CAI,Congcong MEI,Mingxin WANG

Journal Article

Computer modeling of crystal growth of silicon for solar cells

Lijun LIU, Xin LIU, Zaoyang LI, Koichi KAKIMOTO

Journal Article

Atomistic understanding of interfacial processing mechanism of silicon in water environment: A ReaxFF

Journal Article

Effect of extrusion temperature on the physical properties of high-silicon aluminum alloy

YANG Fuliang, GAN Weiping, CHEN Zhaoke

Journal Article

Behavior of Impurities, Defects and Surface Morphology for Silicon and Silicon Based Semiconducting Materials

Tu Hailing

Journal Article

Laser enhanced gettering of silicon substrates

Daniel CHEN,Matthew EDWARDS,Stuart WENHAM,Malcolm ABBOTT,Brett HALLAM

Journal Article

Special issue: Technologies for future high-efficiency industrial silicon wafer solar cells

Journal Article

Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

Journal Article

Erratum to: Enhancing the photoelectrochemical performance of p-silicon through TiO coating decorated

Journal Article

Effects of taping on grinding quality of silicon wafers in backgrinding

Zhigang DONG, Qian ZHANG, Haijun LIU, Renke KANG, Shang GAO

Journal Article