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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 1,   Pages 37-43 doi: 10.1007/s11465-008-0001-x

Abstract: mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical

Keywords： mini-spectrophotometer     referenced     micro-silicon-fixer     electro-mechanical     correlation coefficient    

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Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

Frontiers of Engineering Management 2016, Volume 3, Issue 2,   Pages 115-122 doi: 10.15302/J-FEM-2016019

Abstract: assessment method and the life cycle cost analysis, the optimal timing model of active remanufacturing for electro-mechanicalremanufacturing as its guidance, this study explores the economic efficiency and corresponding operation mode of electro-mechanicalTo validate the optimal timing model for electro-mechanical products active remanufacturing, a specific

Keywords： electro-mechanical products     active remanufacturing     optimal timing     reverse logistics     recycling mode    

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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Frontiers of Mechanical Engineering 2023, Volume 18, Issue 2, doi: 10.1007/s11465-023-0747-1

Abstract: However, attention has been rarely given on the influences of external mechanical and internal electricalIn this work, a bionic swallow structure design norm was developed for mechanical decoupling, and theinfluences of structural parameters on mechanical behavior were fully analyzed and optimized.High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058%

Keywords： micro-electro-mechanical system capacitive sensor     bionics     operation instability     mechanical and electrical    

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Stiction and Friction in Micro Electro Mechanical Systems

Wang Weiyuan

Strategic Study of CAE 2000, Volume 2, Issue 3,   Pages 36-41

Abstract:

The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.The stiction, called release-related stiction, can occur within micron gaps of Si microstuctures during the etching of sacrifacial layer by HF and drying. It can also occur after packaging of the device due to over range of input signals and is called in-use stiction. It is concluded that the capillary force of water between two Si hydrophilic surfaces at separation gap of micron is the major contributor to the release-related stiction. The origin of in-use adhesion is from the chemical state of Si surface. Coating of anti-stiction films on the surface of Si microstructures and packaging of devices under dry atmosphere or vacuum are the most important methods to prevent the in MEMS devices from stiction. The preparation technology of anti-stiction films and its problems are described. Comparing with stiction, the friction is more complex. The commercially produced accelerometers and digital mirror devices are the devices with no direct contact friction. After using anti-stiction films, the stiction is fully prevented, and even the friction is apparently decreased. However, friction still exists in MEMS of direct contact moving parts. The wear resoluted from friction will decrease the reliability and lifetime of the devices. To fabricate the films with anti-stiction and wear-resitsting ability are the key research projects in high speed moving MEMS devices.

Keywords： micro electro mechanical systems     stiction     friction     anti-stiction films     wear-resisting films    

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Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for Research Article

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Frontiers of Information Technology & Electronic Engineering 2022, Volume 23, Issue 5,   Pages 801-809 doi: 10.1631/FITEE.2100236

Abstract: We propose an inductor-capacitor (LC) wireless passive , which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using . It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s). Moreover, the maximum error of the accelerometer was less than 0.037%.

Keywords： Bending structure surfaces     Flexible accelerometer     Micro-electro-mechanical system (MEMS) technology    

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Multiobjective trajectory optimization of intelligent electro-hydraulic shovel

Frontiers of Mechanical Engineering 2022, Volume 17, Issue 4, doi: 10.1007/s11465-022-0706-2

Abstract: consumption, execution time, and excavation volume as the objective functions is presented for the electro-hydraulic

Keywords： trajectory planning     electro-hydraulic shovel     cubic polynomial S-curve     multiobjective optimization    

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2,   Pages 146-149 doi: 10.1007/s11465-013-0260-z

Abstract:

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

Keywords： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency    

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Identification of resistant pharmaceuticals in ozonation using QSAR modeling and their fate in electro-peroxone

Frontiers of Environmental Science & Engineering 2021, Volume 15, Issue 5, doi: 10.1007/s11783-021-1394-6

Abstract:

• Effect of converting ozonation to E-peroxone was studied on pharmaceutical removal.

Keywords： Ozone     Electro-peroxone     Wastewater     Quantitative structure activity relationship     Advanced oxidation    

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Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

Frontiers in Energy 2009, Volume 3, Issue 4,   Pages 381-388 doi: 10.1007/s11708-009-0057-2

Abstract: The effect of Joule heating on the steady state electro-osmotic flow in a closed-end micro-channel is

Keywords： closed-end micro-channel     electrical double layer     electro-osmotic flow     induced pressure gradient     Joule    

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Vehicle roll stability control with active roll-resistant electro-hydraulic suspension

Lijun XIAO, Ming WANG, Bangji ZHANG, Zhihua ZHONG

Frontiers of Mechanical Engineering 2020, Volume 15, Issue 1,   Pages 43-54 doi: 10.1007/s11465-019-0547-9

Abstract: This study examines roll stability control for vehicles with an active roll-resistant electro-hydraulic

Keywords： electro-hydraulic suspension     roll stability     LQR     experiment    

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Effect of polymer structures on electro-optical properties of polymer stabilized liquid crystal films

WANG Shoulian, HE Jie, ZENG Yu, YAN Bin, WANG Yinghan

Frontiers of Chemical Science and Engineering 2008, Volume 2, Issue 3,   Pages 265-268 doi: 10.1007/s11705-008-0054-8

Abstract: The polymer stabilized liquid crystal (PSLC) film is a relatively novel electro-optical material, whicheffects of liquid crystal concentration, curing time, monomer structures and alignment layer on the electro-opticalbifunctional monomer shows a higher T, while those from the single functional monomer exhibited a deformed electro-optical
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Platinum on nitrogen doped graphene and tungsten carbide supports for ammonia electro-oxidation reaction

Frontiers of Chemical Science and Engineering 2022, Volume 16, Issue 6,   Pages 930-938 doi: 10.1007/s11705-021-2130-2

Abstract: Ammonia electrooxidation reaction involving multistep electron-proton transfer is a significant reaction for fuel cells, hydrogen production and understanding nitrogen cycle. Platinum has been established as the best electrocatalyst for ammonia oxidation in aqueous alkaline media. In this study, Pt/nitrogen-doped graphene (NDG) and Pt/tungsten monocarbide (WC)/NDG are synthesized by a wet chemistry method and their ammonia oxidation activities are compared to commercial Pt/C. Pt/NDG exhibits a specific activity of 0.472 mA∙cm–2, which is 44% higher than commercial Pt/C, thus establishing NDG as a more effective support than carbon black. Moreover, it is demonstrated that WC as a support also impacts the activity with further 30% increase in comparison to NDG. Surface modification with Ir resulted in the best electrocatalytic activity with Pt-Ir/WC/NDG having almost thrice the current density of commercial Pt/C. This work adds insights regarding the role of NDG and WC as efficient supports along with significant impact of Ir surface modification.

Keywords： Ammonia electro-oxidation reaction     electrocatalyst supports     platinum     nitrogen doped graphene     tungsten    

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Combination of the direct electro-Fenton process and bioremediation for the treatment of pyrene-contaminated

Wendi XU,Shuhai GUO,Gang LI,Fengmei LI,Bo WU,Xinhong GAN

Frontiers of Environmental Science & Engineering 2015, Volume 9, Issue 6,   Pages 1096-1107 doi: 10.1007/s11783-015-0804-z

Abstract: A combined treatment technology (DEF-BIO) using the direct electro-Fenton (DEF) process and bioremediation

Keywords： direct electro-Fenton     bioremediation     slurry reactor     combined process     pyrene    

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Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Strategic Study of CAE 2002, Volume 4, Issue 6,   Pages 56-62

Abstract:

The packaging of micro electro mechanical systems (MEMS) is referred to first-level packaging and

Keywords： packaging of MEMS     bulk silicon bonding technology     film-sealed technology    

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Electroconductive RGO-MXene membranes with wettability-regulated channels: improved water permeability and electro-enhanced

Frontiers of Environmental Science & Engineering 2023, Volume 17, Issue 1, doi: 10.1007/s11783-023-1601-8

Abstract:

● Electroconductive RGO-MXene membranes were fabricated.

Keywords： Reduced graphene oxide     MXene     Membrane     Water permeance     Dye rejection     Electro-assistance    

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Title Author Date Type Operation

Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Journal Article

Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

Journal Article

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Journal Article

Stiction and Friction in Micro Electro Mechanical Systems

Wang Weiyuan

Journal Article

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Journal Article

Multiobjective trajectory optimization of intelligent electro-hydraulic shovel

Journal Article

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Journal Article

Identification of resistant pharmaceuticals in ozonation using QSAR modeling and their fate in electro-peroxone

Journal Article

Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

Journal Article

Vehicle roll stability control with active roll-resistant electro-hydraulic suspension

Lijun XIAO, Ming WANG, Bangji ZHANG, Zhihua ZHONG

Journal Article

Effect of polymer structures on electro-optical properties of polymer stabilized liquid crystal films

WANG Shoulian, HE Jie, ZENG Yu, YAN Bin, WANG Yinghan

Journal Article

Platinum on nitrogen doped graphene and tungsten carbide supports for ammonia electro-oxidation reaction

Journal Article

Combination of the direct electro-Fenton process and bioremediation for the treatment of pyrene-contaminated

Wendi XU,Shuhai GUO,Gang LI,Fengmei LI,Bo WU,Xinhong GAN

Journal Article

Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Journal Article

Electroconductive RGO-MXene membranes with wettability-regulated channels: improved water permeability and electro-enhanced

Journal Article