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Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation

Romain Chanson, Remi Dussart, Thomas Tillocher, P. Lefaucheux, Christian Dussarrat, Jean François de Marneffe

Frontiers of Chemical Science and Engineering 2019, Volume 13, Issue 3,   Pages 511-516 doi: 10.1007/s11705-019-1820-5

Abstract: paper, we focus on porous SiOCH low- damage mitigation using cryogenic temperature so as to enable micro-capillary

Keywords： low-k     nanotechnology     micro-electronics     cryo-etching     plasma processing    

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Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact

Qin ZHANG, Yi ZHENG, Jing LIU

Frontiers in Energy 2012, Volume 6, Issue 4,   Pages 311-340 doi: 10.1007/s11708-012-0214-x

Abstract: Electronics, such as printed circuit board (PCB), transistor, radio frequency identification (RFID),As an alternative, the newly emerging ink-jet printing electronics are gradually shaping modern electronicThe method has been named as direct writing of electronics based on alloy and metal (DREAM) ink.discoveries being kept made along this category, it was found that a new area enabled by the DREAM ink electronicsThe merits and demerits between conventional printed electronics and the new direct writing methods were

Keywords： direct writing of electronics based on alloy and metal (DREAM) ink     direct writing of electronics     printedelectronics     liquid metal ink     integrated circuit     consumer electronics     nano liquid metal    

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Tailoring electrical conductivity of two dimensional nanomaterials using plasma for edge electronics:

Aswathy Vasudevan, Vasyl Shvalya, Aleksander Zidanšek, Uroš Cvelbar

Frontiers of Chemical Science and Engineering 2019, Volume 13, Issue 3,   Pages 427-443 doi: 10.1007/s11705-019-1805-4

Abstract: review deals with recent advances in the modification of 2D carbon nanostructures for novel ‘edge’ electronics

Keywords： graphene     edge electronics     2D nanomaterials     plasma     electrical conductivity    

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Laser sintering of Cu nanoparticles on PET polymer substrate for printed electronics at different wavelengths

Juan Carlos HERNANDEZ-CASTANEDA, Boon Keng LOK, Hongyu ZHENG

Frontiers of Mechanical Engineering 2020, Volume 15, Issue 2,   Pages 303-318 doi: 10.1007/s11465-019-0562-x

Abstract: These materials are commonly used in manufacturing functional printed electronics for large-area applications

Keywords： laser sintering     copper nanoparticles     printed electronics    

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Multi-time scale dynamics in power electronics-dominated power systems

Xiaoming YUAN, Jiabing HU, Shijie CHENG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 3,   Pages 303-311 doi: 10.1007/s11465-017-0428-z

Abstract:

Electric power infrastructure has recently undergone a comprehensive transformation from electromagnetics to semiconductors. Such a development is attributed to the rapid growth of power electronic converter applications in the load side to realize energy conservation and on the supply side for renewable generations and power transmissions using high voltage direct current transmission. This transformation has altered the fundamental mechanism of power system dynamics, which demands the establishment of a new theory for power system control and protection. This paper presents thoughts on a theoretical framework for the coming semiconducting power systems.

Keywords： power electronics     power systems     multi-time scale dynamics     mass-spring-damping model     self-stabilizing    

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Back-End Electronics Manufacturing Equipment in China and Their Key Components

Chen Xin , Chen Yun , Chen Xun , Wu Xiaojie

Strategic Study of CAE 2022, Volume 24, Issue 4,   Pages 74-84 doi: 10.15302/J-SSCAE-2022.04.008

Abstract: Typical back-end electronics manufacturing equipment.), North Huachuang Technology, Shanghai Micro Semiconductor Equipment, and numerous “specializedmodern military technologies, server central processing units, graphics processing units, mini- or micro-light-emittingsans-serif">Micro-LEDspan style="font-weight:400">Ultra-micro

Keywords： back-end electronics manufacturing     supply chain reshaping     electronics manufacturing equipment     multi-chip    

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Take back and treatment of discarded electronics: a scientific update

Ab STEVELS, Jaco HUISMAN, Feng WANG, Jinhui LI, Boyang LI, Huabo DUAN

Frontiers of Environmental Science & Engineering 2013, Volume 7, Issue 4,   Pages 475-482 doi: 10.1007/s11783-013-0538-8

Abstract: This paper indicates that the performance of tack-back and treatment of electronic waste (e-waste) system can be improved substantially. This can be reached by better taking into account in a better way the big variety in material composition and potential toxicity of electrical and electronic products – from a technical, organizational and regulatory perspective. Realizing that there is no ‘one size fit for all’ and combining smart tailor made solutions with economic of sale will result in the best environmental gain/cost ratio. Several examples show how science and engineering have supported or will support this approach.

Keywords： e-waste     take back     treatment     substantially    

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Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 539-545 doi: 10.1007/s11465-017-0427-0

Abstract:

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuitThe micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuitsIn our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect

Keywords： micro flow sensor     flexible sensor     surface flow sensing     aerodynamic parameter     micro aerial vehicle (MAV    

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2,   Pages 146-149 doi: 10.1007/s11465-013-0260-z

Abstract:

To predict more precisely the frequency of force-balanced micro accelerometer with different biasBased on the theoretical results, micro accelerometer is fabricated and tested to study the influences

Keywords： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency    

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Numerical simulation of micro scale flowing and boiling

Wen WANG, Rui ZHUAN,

Frontiers in Energy 2009, Volume 3, Issue 4,   Pages 396-401 doi: 10.1007/s11708-009-0049-2

Abstract: Numerical simulations of flowing and boiling in micro channels are presented, including the modelingThe simulated results also show the details of 3-dimensional heat transfer and the flow in micro channels, which are helpful to the investigation of the mechanism of two-phase heat transfer and flow in micro

Keywords： volume-of-fluid (VOF)     micro channel     nucleate boiling     bubble dynamics     simulation    

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Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

ZHANG Ruihua, CHEN Haichu

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 4,   Pages 433-438 doi: 10.1007/s11465-007-0074-y

Abstract: This paper develops a 30 mm × 30 mm × 50 mm spherical micro actuator driven by piezoelectric ceramicwith a micro-gripper based on the sample spherical micro actuator, and the experimental research onthe micro assembly is conducted between a micro shaft of 180 μm and a micro spindle sleeve of 200 μm.the metal sphere and the friction block of the micro driving unit are analyzed.micro operation and assembly for micro electro mechanical systems (MEMS) or other microelements in micro

Keywords： spherical     micro-gripper     friction coefficient     dynamic     frequency    

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A Personal Desktop Liquid-Metal Printer as a Pervasive Electronics Manufacturing Tool for Society in Artical

Jun Yang,Yang Yang,Zhizhu He,Bowei Chen,Jing Liu

Engineering 2015, Volume 1, Issue 4,   Pages 506-512 doi: 10.15302/J-ENG-2015042

Abstract:

It has long been a dream in the electronics industry to be able to write out electronics directly,This liquid-metal printer is an automatic, easy-to-use, and low-cost personal electronics manufacturingThis desktop liquid-metal printer is expected to become a basic electronics manufacturing tool for a

Keywords： liquid-metal printer     printed electronics     additive manufacturing     maker     do-it-yourself (DIY) electronics    

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Laboratory assessment of Alaska aggregates using Micro-Deval test

Jenny LIU,Sheng ZHAO,Anthony MULLIN

Frontiers of Structural and Civil Engineering 2017, Volume 11, Issue 1,   Pages 27-34 doi: 10.1007/s11709-016-0359-5

Abstract: This paper presents a study to investigate the feasibility of using Micro-Deval test, commonly used inMicro-Deval test, Washington degradation test and other tests currently specified in Alaska were conductedBased on the testing results, it is found that using Micro-Deval test for durability assessment of Alaskaaggregates was feasible and reproducible, and a high potential was revealed to use Micro-Deval testIt is recommended that Micro-Deval test be considered as an additional test for a certain period, but

Keywords： aggregate durability     Washington degradation test     Micro-Deval test    

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Technology Foresight on China’s Information and Electronics Engineering Science and Technology to 2035

An Da,Li Mengnan,Xu Shouren,Tao Li and Liang Zhihao

Strategic Study of CAE 2017, Volume 19, Issue 1,   Pages 50-56 doi: 10.15302/J-SSCAE-2017.01.008

Abstract: the most innovative, integrated, and cutting-edge science and technology fields, the information and electronicsStrategy 2035", this study implemented two rounds of investigation into the field of information and electronics

Keywords： information and electronics     Delphi method     technology foresight     engineering science and technology    

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Characterization of micro-mixing in a novel impinging streams reactor

Hui HU, Zhiming CHEN, Zhen JIAO

Frontiers of Chemical Science and Engineering 2009, Volume 3, Issue 1,   Pages 58-64 doi: 10.1007/s11705-009-0106-8

Abstract: increase of flux, the decrease of inter-nozzle distance and a suitable circulation can improve the micro-mixingBased on turbulence theory, it was estimated that the characteristic micro-mixing time was 0.002—0.02The micro-mixing time was related to the segregation index, which was in good agreement with those in

Keywords： micro-mixing     impinging streams reactor     turbulent mixing     mass transfer    

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Title Author Date Type Operation

Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation

Romain Chanson, Remi Dussart, Thomas Tillocher, P. Lefaucheux, Christian Dussarrat, Jean François de Marneffe

Journal Article

Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact

Qin ZHANG, Yi ZHENG, Jing LIU

Journal Article

Tailoring electrical conductivity of two dimensional nanomaterials using plasma for edge electronics:

Aswathy Vasudevan, Vasyl Shvalya, Aleksander Zidanšek, Uroš Cvelbar

Journal Article

Laser sintering of Cu nanoparticles on PET polymer substrate for printed electronics at different wavelengths

Juan Carlos HERNANDEZ-CASTANEDA, Boon Keng LOK, Hongyu ZHENG

Journal Article

Multi-time scale dynamics in power electronics-dominated power systems

Xiaoming YUAN, Jiabing HU, Shijie CHENG

Journal Article

Back-End Electronics Manufacturing Equipment in China and Their Key Components

Chen Xin , Chen Yun , Chen Xun , Wu Xiaojie

Journal Article

Take back and treatment of discarded electronics: a scientific update

Ab STEVELS, Jaco HUISMAN, Feng WANG, Jinhui LI, Boyang LI, Huabo DUAN

Journal Article

Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

Journal Article

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Journal Article

Numerical simulation of micro scale flowing and boiling

Wen WANG, Rui ZHUAN,

Journal Article

Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

ZHANG Ruihua, CHEN Haichu

Journal Article

A Personal Desktop Liquid-Metal Printer as a Pervasive Electronics Manufacturing Tool for Society in

Jun Yang,Yang Yang,Zhizhu He,Bowei Chen,Jing Liu

Journal Article

Laboratory assessment of Alaska aggregates using Micro-Deval test

Jenny LIU,Sheng ZHAO,Anthony MULLIN

Journal Article

Technology Foresight on China’s Information and Electronics Engineering Science and Technology to 2035

An Da,Li Mengnan,Xu Shouren,Tao Li and Liang Zhihao

Journal Article

Characterization of micro-mixing in a novel impinging streams reactor

Hui HU, Zhiming CHEN, Zhen JIAO

Journal Article