《工程(英文)》 >> 2023年 第23卷 第4期 doi: 10.1016/j.eng.2022.07.021
关于后摩尔时代我国集成电路制造领域的一些思考
School of Micro-Nano Electronics, Zhejiang University, Hangzhou 310058, China
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参考文献
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