《工程(英文)》 >> 2023年 第24卷 第5期 doi: 10.1016/j.eng.2023.04.006
微纳操作与表征
a Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, M5S 3G8, Canada
b Institute for Microrobotics and Control Engineering, University of Oldenburg, Oldenburg D-26129, Germany
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