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期刊论文 2

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2008 2

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Piezoelectric diffuser/nozzle micropump with double pump chambers

WANG Wei, ZHANG Ying, TIAN Li, CHEN Xiaojie, LIU Xiaowei

《机械工程前沿（英文）》 2008年第3卷第4期页码 449-453 doi: 10.1007/s11465-008-0076-4

摘要： To eliminate check valve fatigue and valve clogging, diffuser/nozzle elements are used for flow rectification in a valveless diffuser/nozzle micropump instead of valves. However, the application of this type of micropump is restricted because of its pulsating or periodic flow and low pump flux. In this paper, a diffuser/nozzle Si/Glass micropump with two pump chambers by IC and MEMS technology is designed. The fabrication process requires only one mask and one etch step, so that the fabrication has the advantages of low cost, short processing period, and facilitation of miniaturization. The pump is equipped with a glass cover board so as to conveniently observe the flow status. Pump-chambers and diffuser elements are fabricated by the anisotropic KOH-etch technique on the silicone substrate, and the convex corner is designed to compensate for an anisotropic etch. The driving force of the micropump is produced by the PZT piezoelectric actuator. The pump performance with both actuators actuated in anti- or same-phase mode is also researched. The result indicates that the micropump achieves great performance with the actuators working at anti-phase. This may be because the liquid flows steadily, pulse phenomenon is very weak, and the optimal working frequency, pump back pressure, and flow rate are both double that of the pump driven in same-phase.

关键词： diffuser/nozzle Si/Glass phenomenon rectification diffuser/nozzle micropump frequency

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Flow behavior of liquid-solid coupled system of piezoelectric micropump

LU Lijun, WU Jiankang

《机械工程前沿（英文）》 2008年第3卷第1期页码 50-54 doi: 10.1007/s11465-008-0003-8

摘要： This paper employs a shallow water model and the finite element method to approximate periodical flows of a micropump to a two-dimensional thickness-averaged flow. A liquid-solid coupled system equation of the micropump is presented. Through the mode analysis of the liquid-solid coupled system, the first-order natural frequency, diaphragm vibration shape and amplitude-frequency relationship are obtained. The vibration response of the diaphragm is calculated when an external electric field is applied. Based on the thickness-averaged flow equation, the periodical flow of the micropump is studied using the finite volume method to investigate the flow behavior and flow rate-frequency characteristics. Numerical results indicate that an optimal working frequency can be obtained, at which the flow rate of the micropump achieves the maximum when the external electric voltage is fixed.

关键词： amplitude-frequency relationship first-order micropump diaphragm vibration electric