2024, Volume 36, Issue 5
Engineering >> 2024, Volume 36, Issue 5 doi: 10.1016/j.eng.2023.12.013
MEMS Huygens Clock Based on Synchronized Micromechanical Resonators
a State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China
b School of Construction Machinery, Chang'an University, Xi'an 710064, China
c Department of Mechanics, Zhejiang University, Hangzhou 310027, China
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Abstract
With the continuous miniaturization of electronic devices, microelectromechanical system (MEMS) oscillators that can be combined with integrated circuits have attracted increasing attention. This study reports a MEMS Huygens clock based on the synchronization principle, comprising two synchronized MEMS oscillators and a frequency compensation system. The MEMS Huygens clock improved short-time stability, improving the Allan deviation by a factor of 3.73 from 19.3 ppb to 5.17 ppb at 1 s. A frequency compensation system based on the MEMS oscillator’s temperature-frequency characteristics was developed to compensate for the frequency shift of the MEMS Huygens clock by controlling the resonator current. This effectively improved the long-term stability of the oscillator, with the Allan deviation improving by 1.6343 × 105 times to 30.9 ppt at 6000 s. The power consumption for compensating both oscillators simultaneously is only 2.85 mW∙°C−1. Our comprehensive solution scheme provides a novel and precise engineering solution for achieving high-precision MEMS oscillators and extends synchronization applications in MEMS.
Keywords
Frequency stability ; Huygens clock ; MEMS ; Oscillator ; Synchronization
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