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2000 1

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polysilicon 1

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trichlorosilane method 1

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The Production Technology of Electronic Grade Polycrystalline Silicon

Liang Junwu

Strategic Study of CAE 2000, Volume 2, Issue 12,   Pages 34-39

Abstract: The bell jar, fluidized bed and free-space polysilicon reactors for polysilicon deposition are comparedIn addition, the flow charts of polysilicon production are described.bell jar reactors is suitable for a plant with an annual production of 1 000 tons of electronic grade polysilicon

Keywords： polysilicon     trichlorosilane method     silane method     flow chart     production    

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The Production Technology of Electronic Grade Polycrystalline Silicon

Liang Junwu

Journal Article