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A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication

Athanasios Smyrnakis, Angelos Zeniou, Kamil Awsiuk, Vassilios Constantoudis, Evangelos Gogolides

Frontiers of Chemical Science and Engineering 2019, Volume 13, Issue 3,   Pages 475-484 doi: 10.1007/s11705-019-1809-0

Abstract: etched polymeric (PMMA) film and transfer it to a silicon substrate for the fabrication of silicon nanopillarsmixed fluorine-fluorocarbon-oxygen nanoscale etch plasma process was employed to fabricate silicon nanopillars

Keywords： plasma     nanoassembly     etching     nanodots     nanopillars     nanofabrication    

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A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication

Athanasios Smyrnakis, Angelos Zeniou, Kamil Awsiuk, Vassilios Constantoudis, Evangelos Gogolides

Journal Article