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Frontiers of Chemical Science and Engineering >> 2019, Volume 13, Issue 3 doi: 10.1007/s11705-019-1809-0
A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
. Institute of Nanoscience & Nanotechnology, NCSR “Demokritos”, Ag. Paraskevi, 15341 Attica, Greece.. Department of Physics, University of Patras, 26504 Patras, Greece.. M. Smoluchowski Institute of Physics, Jagiellonian University, 30-348 Krakow, Poland
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Keywords
plasma ; nanoassembly ; etching ; nanodots ; nanopillars ; nanofabrication
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