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Frontiers of Information Technology & Electronic Engineering >> 2018, Volume 19, Issue 6 doi: 10.1631/FITEE.1601692
A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.. University of Chinese Academy of Sciences, Beijing 100039, China.
Abstract
Keywords
Interferometry ; Phase measurement ; Phase-shifting algorithms
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