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Frontiers of Information Technology & Electronic Engineering >> 2017, Volume 18, Issue 5 doi: 10.1631/FITEE.1500454
Micro-angle tilt detection for the rotor of a novel rotational gyroscopewith a 0.47’’ resolution
. MEMS Center, Harbin Institute of Technology, Harbin 150001, China.. MOE Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin 150001, China
Abstract
Keywords
Micro-angle detection ; Differential capacitive structure ; Rotational gyroscope ; Structure optimization
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