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Prospects of Microsystems Research and Development

Zhong Xianxin

Strategic Study of CAE 2000, Volume 2, Issue 1,   Pages 81-84

Abstract: the focus of the microsystems research and development as followings： science and technology at the microdomain

Keywords： microsystems     microdomain     sensing and processing     nanometer measurement     new materi-als     microfabrication    

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Prospects of Microsystems Research and Development

Zhong Xianxin

Journal Article