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Prospects of Microsystems Research and Development
Zhong Xianxin
Strategic Study of CAE 2000, Volume 2, Issue 1, Pages 81-84
The microsystems research and development extends into various fields including the micro electronicWhen considering potential uses in future, microsystems technologies are still at the elementary stageResearch today is mainly centered on fundamental technologies common to various microsystems.
May be the focus of the microsystems research and development as followings： science and technology
Keywords： microsystems microdomain sensing and processing nanometer measurement new materi-als microfabrication
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