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Fabrication of micro/nano-structures by electrohydrodynamic jet technique
Dazhi WANG, Xiaojun ZHAO, Yigao LIN, Tongqun REN, Junsheng LIANG, Chong LIU, Liding WANG
《机械工程前沿(英文)》 2017年 第12卷 第4期 页码 477-489 doi: 10.1007/s11465-017-0461-y
Electrohydrodynamic jet (E-Jet) is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liquid jet, which is further disintegrated into droplets. The major advantage of the E-Jet technique is that the sizes of the jet formed can be at the nanoscale far smaller than the nozzle size, which can realize high printing resolution with less risk of nozzle blockage. The E-Jet technique, which mainly includes E-Jet deposition and E-Jet printing, has a wide range of applications in the fabrication of micro/nano-structures for micro/nano-electromechanical system devices. This technique is also considered a micro/nano-fabrication method with a great potential for commercial use. This study mainly reviews the E-Jet deposition/printing fundamentals, fabrication process, and applications.
关键词: electrohydrodynamic jet deposition electrohydrodynamic jet printing micro/nano-structures film
Recent advances in ultrasonic-assisted machining for the fabrication of micro/nano-textured surfaces
Shaolin XU,Tsunemoto KURIYAGAWA,Keita SHIMADA,Masayoshi MIZUTANI
《机械工程前沿(英文)》 2017年 第12卷 第1期 页码 33-45 doi: 10.1007/s11465-017-0422-5
In this paper, the state of art of ultrasonic-assisted machining technologies used for fabrication of micro/nano-textured surfaces is reviewed. Diamond machining is the most widely used method in industry for manufacturing precision parts. For fabrication of fine structures on surfaces, conventional diamond machining methods are competitive by considering the precision of structures, but have limitations at machinable structures and machining efficiency, which have been proved to be partly solved by the integration of ultrasonic vibration motion. In this paper, existing ultrasonic-assisted machining methods for fabricating fine surface structures are reviewed and classified, and a rotary ultrasonic texturing (RUT) technology is mainly introduced by presenting the construction of vibration spindles, the texturing principles, and the applications of textured surfaces. Some new ideas and experimental results are presented. Finally, the challenges in using the RUT method to fabricate micro/nano-textured surfaces are discussed with respect to texturing strategies, machinable structures, and tool wear.
关键词: ultrasonic-assisted machining textured surface micro/nano-structures functional performance
Salt-assisted synthesis of tree-like oriented SnO
Jinquan SUN, Zifeng YAN, Hongzhi CUI
《化学科学与工程前沿(英文)》 2011年 第5卷 第2期 页码 227-230 doi: 10.1007/s11705-010-0566-x
蒋庄德,王琛英,杨树明
《中国工程科学》 2013年 第15卷 第1期 页码 15-20
针对纳米器件中的典型几何特征,制备了3种纳米结构,采用扫描电子显微镜(SEM)、原子力显微镜(AFM)等测量工具对所制备的纳米样板进行了测量、分析和表征。提出转换薄膜厚度为线宽的公称值、基于多层薄膜淀积技术制备纳米宽度结构的方法,制备出了具有名义线宽尺寸分别为20 nm、25 nm、35 nm的纳米栅线结构。用离线的图像分析算法对所制备的纳米线宽样板的线边缘粗糙度/线宽粗糙度(LER/LWR)以及栅线线宽的一致性进行了评估。实验表明所制备纳米线宽样板的栅线具有较好的一致性,LER/LWR值小,且具有垂直的侧壁。采用电子束直写技术(EBL)和感应耦合等离子体刻蚀(ICP)制备了名义高度为220 nm的硅台阶样板。实验表明刻蚀后栅线边缘LER/LWR的高频成分减少,相关长度变长,均方根偏差值(σ)增大。采用聚焦离子束(FIB)制备了纳米单台阶和多台阶结构,并对Z方向的尺度与加工能量之间的关系进行了分析。
Water-dispersible nano-pollutions reshape microbial metabolism in type-specific manners: A metabolic
《环境科学与工程前沿(英文)》 2022年 第16卷 第9期 doi: 10.1007/s11783-022-1548-1
• Water-dispersible nano-pollutions exhibit type-specific toxic effects on E. coli.
关键词: Nano-toxicity Nano-plastics Quantum dots Microbial metabolite Metabolic dysregulation
Yunge WEI; Jiayu WANG; Ruoyu LI; Ling XU; Feipeng XIAO
《结构与土木工程前沿(英文)》 2022年 第16卷 第11期 页码 1474-1485 doi: 10.1007/s11709-022-0869-2
关键词: nano-cellulose emulsified asphalt binder dispersion rheological properties Fourier transform infrared spectroscopy
《化学科学与工程前沿(英文)》 2023年 第17卷 第9期 页码 1289-1300 doi: 10.1007/s11705-023-2299-7
关键词: biowaste chitin nanofibrous palladium nano-catalyst catalysis
《环境科学与工程前沿(英文)》 2021年 第15卷 第5期 doi: 10.1007/s11783-021-1388-4
• Biochar enhanced the mobility and stability of zero-valent iron nanoparticles.
Immunological effects of nano-enabled hyperthermia for solid tumors: opportunity and challenge
《化学科学与工程前沿(英文)》 2022年 第16卷 第3期 页码 333-344 doi: 10.1007/s11705-021-2059-5
关键词: nano-enabled hyperthermia immunogenic cell death heterogeneous immunological landscape tumor microenvironment
Behavior of aqueous stable colloidal nano-C
Jing HUO,Ye YU,Ling GE,Bo ZHANG,Yiliang HE
《环境科学与工程前沿(英文)》 2015年 第9卷 第2期 页码 197-205 doi: 10.1007/s11783-014-0624-6
关键词: nano-C60 (nC60) aggregates photochemical reactivity artificial biological membrane
《机械工程前沿(英文)》 2023年 第18卷 第1期 doi: 10.1007/s11465-022-0720-4
关键词: milling force nanofluid minimum quantity lubrication aerospace aluminum alloy nano biological lubricant
姚骏恩
《中国工程科学》 2003年 第5卷 第1期 页码 33-37
纳米科技是当今国际上的一个热点。文章对纳米科技作了简要介绍, 纳米测量和加工是纳米科技中的一个不可缺少的重要组成部分。叙述了发展纳米测量和纳米加工技术的两个主要途径:一是发展传统技术,主要是电子显微术以及最近发展起来的聚焦离子束(FIB)- 电子束数控加工中心;二是创造新的测量仪器,建立新原理和新方法,介绍了国内外电子显微镜和扫描探针显微镜这两类纳米测量分析仪器的发展、应用和生产现状。指出我国电子显微仪器和扫描探针显微镜的开发和生产面临困境,应尽快建立和加强自己的电子显微仪器和扫描探针显微镜等纳米测量和纳米加工设备制造产业,并列入国家科技发展规划。
Application and development of modern long-span space structures in China
Shilin DONG, Yang ZHAO, Dong XING
《结构与土木工程前沿(英文)》 2012年 第6卷 第3期 页码 224-239 doi: 10.1007/s11709-012-0166-6
关键词: modern long-span space structures rigid space structures flexible space structures rigid-flexible combined space structures application and development
Practical optimization of deployable and scissor-like structures using a fast GA method
M. SALAR, M. R. GHASEMI, B. DIZANGIAN
《结构与土木工程前沿(英文)》 2019年 第13卷 第3期 页码 557-568 doi: 10.1007/s11709-018-0497-z
关键词: optimization scissor-like structures deployable structures genetic algorithm ABAQUS
《化学科学与工程前沿(英文)》 2022年 第16卷 第8期 页码 1268-1280 doi: 10.1007/s11705-022-2143-5
关键词: atomization nonsolvent induced phase separation bicontinuous porous structure micro-nano composite structure oil-water separation
标题 作者 时间 类型 操作
Fabrication of micro/nano-structures by electrohydrodynamic jet technique
Dazhi WANG, Xiaojun ZHAO, Yigao LIN, Tongqun REN, Junsheng LIANG, Chong LIU, Liding WANG
期刊论文
Recent advances in ultrasonic-assisted machining for the fabrication of micro/nano-textured surfaces
Shaolin XU,Tsunemoto KURIYAGAWA,Keita SHIMADA,Masayoshi MIZUTANI
期刊论文
Water-dispersible nano-pollutions reshape microbial metabolism in type-specific manners: A metabolic
期刊论文
Laboratory investigation of emulsified asphalt binder modified with wood-derived nano-cellulose and nano
Yunge WEI; Jiayu WANG; Ruoyu LI; Ling XU; Feipeng XIAO
期刊论文
Pd nano-catalyst supported on biowaste-derived porous nanofibrous carbon microspheres for efficient catalysis
期刊论文
Effects of different types of biochar on the properties and reactivity of nano zero-valent iron in soil
期刊论文
Mechanical behavior and semiempirical force model of aerospace aluminum alloy milling using nano biological
期刊论文
Application and development of modern long-span space structures in China
Shilin DONG, Yang ZHAO, Dong XING
期刊论文
Practical optimization of deployable and scissor-like structures using a fast GA method
M. SALAR, M. R. GHASEMI, B. DIZANGIAN
期刊论文