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Additive direct-write microfabrication for MEMS: A review

Kwok Siong TEH

《机械工程前沿（英文）》 2017年第12卷第4期页码 490-509 doi: 10.1007/s11465-017-0484-4

摘要：

Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from computer-generated solid models without elaborate intermediate fabrication steps. At the macroscale, direct-write techniques such as stereolithography, selective laser sintering, fused deposition modeling ink-jet printing, and laminated object manufacturing have significantly reduced concept-to-product lead time, enabled complex geometries, and importantly, has led to the renaissance in fabrication known as the . The technological premises of all direct-write additive manufacturing are identical—converting computer generated three-dimensional models into layers of two-dimensional planes or slices, which are then reconstructed sequentially into three-dimensional solid objects in a layer-by-layer format. The key differences between the various additive manufacturing techniques are the means of creating the finished layers and the ancillary processes that accompany them. While still at its infancy, direct-write additive manufacturing techniques at the microscale have the potential to significantly lower the barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMS parts that have larger dimensions, high aspect ratios, and complex shapes. In recent years, significant advancements in materials chemistry, laser technology, heat and fluid modeling, and control systems have enabled additive manufacturing to achieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMS fabrication. Compared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, direct-write additive manufacturing techniques allow for rapid design-to-prototype realization by limiting or circumventing the need for cleanrooms, photolithography and extensive training. With current direct-write additive manufacturing technologies, it is possible to fabricate unsophisticated micrometer scale structures at adequate resolutions and precisions using materials that range from polymers, metals, ceramics, to composites. In both academia and industry, direct-write additive manufacturing offers extraordinary promises to revolutionize research and development in microfabrication and MEMS technologies. Importantly, direct-write additive manufacturing could appreciably augment current MEMS fabrication technologies, enable faster design-to-product cycle, empower new paradigms in MEMS designs, and critically, encourage wider participation in MEMS research at institutions or for individuals with limited or no access to cleanroom facilities. This article aims to provide a limited review of the current landscape of direct-write additive manufacturing techniques that are potentially applicable for MEMS microfabrication.

关键词： direct-write additive manufacturing microfabrication MEMS

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分析芯片微通道制作技术进展

魏守水,张玉林,崔大付

《中国工程科学》 2004年第6卷第10期页码 90-94

摘要：

微通道制作是微分析芯片制作中的关键技术之一。就选取材料的原则，模板复制中的模具制造技术及微通道直接加工方法做了比较，提出了微流体芯片产业化的可行性方案。

关键词：分析芯片微细加工 μ-TAS

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微系统研究展望

钟先信

《中国工程科学》 2000年第2卷第1期页码 81-84

摘要：

微系统是在微米/纳米尺度上开展研究工作的，涉及到多种科学和技术领域，含微电子、微机械、微光学、化学、生物技术和材料等，它是多种技术的综合和多学科交叉的前沿领域，已显示出强大的生命力。微系统研究在传统理论和技术基础上起步和发展，人们在硅片上制作微型机械、微马达和光路系统微型化的惊喜之余，又引起了一些困惑和思考。人们必将冲破传统科学技术和思想，通过科研有所创新和突破，不断开拓进取，真正成为高新技术的生长点和面向市场新的经济增长点，开创21世纪新兴产业，这是当前迫切需要研究的课题。

现在，微系统研究的热点是：微域的科学和技术基础；新的信息获取、传输和处理技术；超精密检测和操作；微系统新材料和微制造技术。

关键词：微系统微域信息获取与处理纳米测量新材料微制造

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静电力驱动的悬臂梁微型电场传感器件 Article

韩志飞, 胡军, 李立浧, 何金良

《工程（英文）》 2023年第24卷第5期页码 184-191 doi: 10.1016/j.eng.2022.06.017

摘要：

随着智能电网和能源互联网的发展，大规模实时电压/电场监测成为电力系统的迫切需求，这依赖于先进传感器件的大规模布置。电场测量在电力系统中具有重要意义。一方面，基于电场测量的电压反演可以实现高电压的非接触式测量，替代传统高压互感器，从而减少测量设备绝缘成本和安装难度；另一方面，电场测量还可以被应用于设备故障诊断、雷电预警、电磁环境测量等应用场景。传统的电场测量设备，如场磨等，往往体积大、成本高，无法大规模灵活布置。本文提出了一种静电力驱动的压阻式微型电场传感器。传感器被设计为四悬臂结构，悬臂在静电力的驱动下产生位移和应变，通过压阻材料转化为可测信
号。所提出的传感器具有尺寸小、成本低、功耗低、易于批量生产的优点。同时，该传感器还具有高信噪比、高分辨率及宽电场测量范围的特点。实验结果表明，所提出的传感器具有1.1~1100.0 kV·m⁻¹的线性测量范围、112 V·m⁻¹·Hz^−1/2的交流电场分辨率以及496 Hz的截止频率。这一微型电场传感器将在智能电网及能源互联网中具有广泛的应用价值。

关键词：微型传感器电气传感器件微加工工艺压阻器件

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A Pt-Bi bimetallic nanoparticle catalyst for direct electro-oxidation of formic acid in fuel cells

Shu-Hong LI, Yue ZHAO, Jian CHU, Wen-Wei LI, Han-Qing YU, Gang LIU, Yang-Chao TIAN

《环境科学与工程前沿（英文）》 2013年第7卷第3期页码 388-394 doi: 10.1007/s11783-012-0475-y

摘要： Direct formic acid fuel cells are a promising portable power-generating device, and the development of efficient anodic catalysts is essential for such a fuel cell. In this work Pt-Bi nanoparticles supported on micro-fabricated gold wire array substrate were synthesized using an electrochemical deposition method for formic acid oxidation in fuel cells. The surface morphology and element components of the Pt-Bi/Au nanoparticles were characterized, and the catalytic activities of the three Pt-Bi/Au nanoparticle electrodes with different Pt/Bi ratios for formic acid oxidation were evaluated. It was found that Pt Bi /Au had a much higher catalytic activity than Pt Bi /Au and Pt Bi /Au, and Pt Bi /Au exhibited a current density of 2.7 mA·cm , which was 27-times greater than that of Pt/Au. The electro-catalytic activity of the Pt-Bi/Au electrode for formic acid oxidation increased with the increasing Bi content, suggesting that it would be possible to achieve an efficient formic acid oxidation on the low Pt-loading. Therefore, the Pt-Bi/Au electrode offers a promising catalyst with a high activity for direct oxidation of formic acid in fuel cells.

关键词： catalyst electrochemical deposition formic acid oxidation fuel cell gold wire array microfabrication

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微观选择性激光熔化技术发展的现状及未来展望 Review

Balasubramanian Nagarajan, Zhiheng Hu, Xu Song, Wei Zhai, Jun Wei

《工程（英文）》 2019年第5卷第4期页码 702-720 doi: 10.1016/j.eng.2019.07.002

摘要：

增材制造（AM）能将各种材料制成形状复杂的部件，因此在制造业中越来越受到青睐。选择性激光熔化（SLM）是一种常见的AM技术，它基于粉床熔融法（PBF）来处理金属，但目前只专注于大中型元件的制作。本文综述了微型金属材料SLM的研究现状。与通常用于微观AM的直接写入技术相比，微观SLM由于许多因素而更加具有吸引力，包括更快的周期时间、流程简单性和材料通用性。此外，本文综合评价了利用SLM和选择性激光烧结（SLS）制造微尺度零件的各种研究工作和商业系统，不仅从微观尺度上找出了SLM存在的问题，包括粉末重涂、激光光学和粉末粒度等，还详细阐述了SLM未来的发展方向。文章详细回顾了粉床技术中现有的粉末重涂方法，并描述了在AM领域实施干粉分配方法的新进展。对AM部件的一些二次整理技术进行了回顾，重点介绍了细微加工特征的应用以及与微观SLM系统的结合。

关键词：增材制造选择性激光熔化微细加工混合处理粉床重涂