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Strategic Study of CAE >> 2005, Volume 7, Issue 3

Principle of Laser Nano-meter Measurement Ruler

The State Key Laboratory of Precision Measurement Technology and Instruments , Tsinghua University , Beijing 100084 , China

Funding project:国家自然科学基金资助项目(68978018,59275237,69286001,69778010,59775088,50127501,60178010) Received: 2004-07-01 Revised: 2004-09-05 Available online: 2005-03-20

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Abstract

In the past applications saw laser as light source only, did not involve in internal structure and physical phenomena of lasers. The efforts had been done to transform single HeNe laser into a sensor, but ceased before great breakthrough. This paper reports the progress in investigating Laser Nano-meter Measurement Ruler, which is just the laser itself. The principle is based on the frequency splitting, mode competition, cavity tuning, etc., of laser, which are done or found by the author and colleagues. The configuration is that employing an inter — cavity birefringence element to split a laser frequency into two frequencies, ⊥light and // light; alternately occurring of strong and medium mode competition as the cavity being tuned, dividing the lasing bandwidth to three equivalent parts; again making the laser longitudinal separation being 4/3 of lasing bandwidth. The consequence is that 丄 light suppressing // light dying out in the first A /8 of mirror displacement, ⊥light and //light oscillating together in the second λ/8, //light suppressing ⊥light dying out in the third λ/8, ⊥light and //light dying out together in the fourth λ/8; with one time of repetition of the four regions the displacement of the mirror is λ /2. Calculating the number of polarization regions the displacement is known. The direction of displacement can be judged by the difference of polarization of each region. The cavity mirror of movement is joined with the object to be measured by a guide. The measurement range: 12 mm, resolution: 79.08 nm, linearity: 5×l0-6, 2σ = 0.314 μm. This achievement is significant for both fields of lasers and metrology.

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